Analysis of MEMS based Piezo-electric Micro Pump |
|
The simulation is referenced from the research: Development of PZT Actuated Valveless Micropump (source: https://www.mdpi.com/1424-8220/18/5/1302)
1. Describing the problem
The following figure is the design of the pump including:
Consider in 5 cycles of vibration of diaphragm pump
Figure 1: Pump design
2. Imposing simulation conditions
Declare PZT-5H material properties using MicroPump ACT
Figure 2: Declaring PZT-5H material properties
Impose electrical excitation to the PZT plate
Figure 3: A voltage of 0V is imposed to the bottom face of the PZT plate |
Figure 4: Sinusoidal voltage imposed to the top face of the PZT plate |
3. Results
- Amplitude of the PZT plate without fluid
Figure 5: The maximum vibration amplitude is 12.395um |
- Amplitude of PZT plate with fluid
Figure 6: The maximum vibration amplitude is 4.6um |
Flow chart at the pump inlet and outlet - The result of fluid
Figure 7: Mass flow at Inlet (red line) and Outlet (blue line)
Video describing fluid flow during pumping
4. Conclusion
Compare the vibration amplitude of the diaphragm:
Flow at inlet and outlet:
Thus, the pump works as expected.
Other cases may be performed to optimize the pump design and working conditions of pump.